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Technology Center

High-Purity Anhydrous Ethanol: Electronic Grade, UP Grade, and UP-S Grade


Ultra-dry ethanol, as a high-purity organic solvent, is irreplaceable in semiconductors, photovoltaics, pharmaceuticals and precision electronics. Graded by purity, UP (Ultra Pure) and UP-S (Ultra Pure-Special) correspond to SEMI G2 and G3, respectively, and differ sharply from standard industrial ethanol. The analysis below covers specifications, manufacturing, applications and market status.

1. SEMI grades and specifications  
SEMI G2 (UP): H₂O ≤ 0.1 %, total metals ≤ 1 ppb (Na, K, Fe ≤ 0.1 ppb each), particles ≥ 0.5 µm ≤ 25 pcs/mL.  
SEMI G3 (UP-S): total metals ≤ 0.5 ppb, H₂O ≤ 0.05 %, particles ≤ 10 pcs/mL.  
China’s GB/T 678-2022 tops out at 99.7 % purity—still a generation behind.

2. Key process steps  
a) Molecular-sieve dehydration: CG-EA318/319 zeolites dehydrate 95 % feed to < 0.1 % H₂O; five-column continuous distillation cuts energy use ~30 %.  
b) Sub-boiling purification: distillation at 50–60 °C prevents thermal charring and lowers particle counts by 80 %.  
c) Point-of-use filtration: 0.1 µm PTFE membrane plus ISO Class 3 fluoropolymer-lined canisters delivers < 5 particles/mL (≥ 0.2 µm).

3. Core applications  
Semiconductors: UP-S ethanol is used for EUV pre-clean; SMIC’s 2024 white-paper shows defect density falling to 0.03 cm⁻².  
Photovoltaics: PERC rear-passivation cleaning with UP ethanol; 1 ppb Na cuts cell efficiency by 0.2 %. LONGi switched fully to SEMI G2 solvent in Q1-25.  
Biopharma: mRNA vaccine DNA-template precipitation demands RNase-free ethanol; UP grade gives 100× lower nuclease residue than pharmacopoeia limit.

4. Market & domestic progress  
Global G3 supply is dominated by Merck (DE) and Honeywell (US) at ~USD 3 000 L⁻¹. Chinese firms Jiangsu Qiangsheng and Shanghai Macklin have achieved UP grade, yet G3 is still imported. Customs data: 2024 China imported 12 kt of electronic ethanol, 65 % G3. CSIC 718 Institute’s super-critical CO₂ process has reached 0.3 ppb metals in pilot scale; G3 localization is targeted for 2026.

5. Quality-control challenges  
Trace analytics: ICP-MS detection limit must reach 0.01 ppb; instruments cost > USD 3 M, barring SMEs.  
Packaging: HDPE bottles leach 0.5 ppb Zn in 30 days; only perfluoroalkoxy resins are acceptable.  
Batch-to-batch stability: K⁺ variation of ±0.2 ppb observed; SPC charts are mandatory.

With 3rd-generation semiconductors and advanced packaging, UP-S demand is forecast to grow 15 % CAGR. Next technical inflection points:  
1) Zeolite-distillation hybrid for 30 % energy savings;  
2) AI-driven purity prediction models;  
3) biodegradable nano-barrier packaging.  
China must synchronize standards, metrology and critical materials to break the foreign monopoly.

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